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ASM 390
This animation shows how a leak can be detected in a vacuum chamber. A gun is used to inject helium into certain parts of the chamber. The injected helium mixes with the hydrogen and nitrogen that are pumped out of the chamber. All gases are now ionized in the mass spectrum by electron bombardment.
Rapid pump down time, high sensitivity, accurate results and minimal detection time: The ASM 390 and ASM 392 are the perfect solution for the semiconductor and the display industries as well as for other demanding applications. A frictionless backing pump, a powerful high vacuum pump – they are ideal for leak testing in clean environments!